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Institute for Microelectronics and Microsystems

Overall presentation

The Institute for Microelectronics and Microsystems is a research institute of the Italian National Research Council (CNR). The Units involved in HELIOS are located in Napoli and Bologna, with a team composed of 7 people of the research staff, 3 research associates from the University of Reggio Calabria and 5 PhD/research fellows from the same University, permanently engaged in the study of new materials and devices for the integration of photonics functions on microchips and microsystems. The activity on silicon photonics was started in 1989 and since then some 150 papers were published on this subjects. More recently, efforts have been concentrated on the exploitation of amorphous silicon technology in photonics and on the design of Photonic Bandgap devices. The two sites both have clean room facilities equipped with complete small microelectronic prototypes production lines. An e-beam lithography system is available in consortium with another institute. Plenty of software simulation/development tools and instrumentation for material and device characterisation are available. The Units operate in tight manner with the Faculty of Engineering of the Mediterranea University of Reggio Calabria.

Activities within HELIOS

Within WP11, IMM will investigate the electro-optic properties of hydrogenated amorphous silicon (a-Si:H) for the design and realisation of an optical modulator. The device will be fabricated at the end of the CMOS process, above the last metallization layer. In fact a-Si:H can be deposited and structured at temperatures as low as 250 °C, and therefore its processing will not disturb the underlaying electronic layer, and will be compatible with the III-V technology necessary for source and photodetection.

The electro-optical effects in a-Si:H will be studied in charge accumulation/depletion conditions. The study will involve the experimental characterisation of these effects in materials deposited in different conditions.

Further information

For further information please contact:
Francesco Della Corte (francesco.dellacorte[at]unirc.it)
IMM website: www.imm.cnr.it

Prototype of an a-Si:H optical modulator Prototype of an a-Si:H optical modulator